Applied and Computational Engineering
- The Open Access Proceedings Series for Conferences
Series Vol. 26 , 07 November 2023
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GaN is a third-generation semiconductor. As an ideal material of the new generation semiconductor today, it has many features such as high saturated electron mobility and wide band. The methods of GaN growth developed rapidly recently. We reviewed recent artiles and then we collect the various of methods about the GaN single crystal growth, after that we compare the difference among these method. This paper mainly talks about three methods of growing GaN single crystal: The Ammonothermal method, the Sodium-flux growth method, and the Halide vapor phase epitaxy (HVPE), and we collect both of the advantages and disadvantages. By putting all characteristics of each methods together we found that combining the HVPE method and Ammonothermal method together can connect the advantages together and avoid some of these disadvantages. We can use the HVPE method to grow the GaN seed and expand the crystal using the Ammonothermal method may be a good choice to grow the GaN single crystal at a low cost. Because if we start with Ammonothermal method, it is easy to form the polycrystalline and if we use the HVPE method to grow large crytal, it is too expensive to do so. Therefore, combining two methods can avoid the disadantages in each other and save the cost when growing.
gallium nitride crystal growth, ammoniathermal method, hydride vapor phase epitaxy, HVPE, sodium-flux method
1. Ren, G., Wang, J., Liu, Z., et al. (2019) Advances in single crystal growth of gallium nitride. Journal of Artificial Crystals, 48(09):1588-1598.
2. Utsumi, W., Saitoh, H., Kaneko, H., et al. (2003) Congruent melting of gallium nitride at 6 GPa and its application to single-crystal growth. Nature Mater, 2: 735–738.
3. Jun, H., Hongyuan W, Shaoyan Y, et al. (2019) Hydride vapor phase epitaxy for gallium nitride substrate. Journal of Semiconductors, 40(10): 101801
4. Boćkowski, M., I. Grzegory, (2022) Recent Progress in Crystal Growth of Bulk GaN. Acta Physica Polonica, A (141): 3.
5. Kim, H., Oh, J.E., Kang, T.W. (2001) Preparation of large area free-standing GaN substrates by HVPE using mechanical polishing liftoff method. Materials Letters, 4: 276-280.
6. Yoshida, T., Imanishi, M., Kitamura, T., et al. (2017), Development of GaN substrate with a large diameter and small orientation deviation. Phys. Status Solidi B, 254: 1600671.
7. Shimizu, A., Kitamoto, A., Kamiyama, M., et al. (2022) Effect of additional N2O gas on the suppression of polycrystal formation and high-rate GaN crystal growth by OVPE method. Journal of Crystal Growth, 581: 126495.
8. He, X., Zang, C., Zhou, H., et al. (2013) Advances in ammonia-thermal growth of gallium nitride crystals. Journal of Artificial Crystallography, 42(7): 1293-1298.
9. Ren, G., Liu, Z., Li, T., et al. (2020) Liquid-phase growth of gallium nitride single crystals. Journal of Artificial Crystallography, 49(11): 2024.
10. Purdy, Andrew, P. (1999) Ammonothermal Synthesis of Cubic Gallium Nitride. Chemistry of Materials, 11: 1648-1651
11. Ehrentraut, D., Pakalapati, R.T., Kamber, D.S., et al. (2013) High-quality, low-cost ammonothermal bulk GaN substrates. Japanese Journal of Applied Physics, 52(8S): 08JA01.
12. Masanori, M., Fumio, K., Minoru, K., et al. (2005) Promoted nitrogen dissolution due to the addition of Li or Ca to Ga-Na melt; some effects of additives on the growth of GaN single crystals using the sodium flux method. Journal of Crystal Growth, 284: 91-99.
The datasets used and/or analyzed during the current study will be available from the authors upon reasonable request.
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